Sputtering targets

Planar Targets
State of the art processing equipment and technological expertise enables SAFINA to produce a wide variety target designs and geometries. Master technicians with years of experience produce these targets with pride and precision.

Special enhanced designs for high utilization and targets for a variety of sputtering equipment may be supplied upon request.

Multi-Piece targets with profiled SST clamps offering WIP reduction and monolithic construction.

Targets for Large Area Coatings
The large area coatings industry is represented by multiple market sectors with numerous types of thin film coatings such as:

• Architectural glass
• Automotive glass
• Displays
• Photovoltaics
• Solar thermal
• Mirrors

SAFINA develops continuously its product range and services to be competitive and able to offer customized solutions for new applications. As one of leading suppliers, SAFINA offers multiple products for a large area coating applications, particularly for flat glass coatings. SAFINA’s R&D team focuses attention namely to the key production concerned with silver planar and silver rotatable targets (both cylindrical and dogbone) in various constructions and designs according to individual customers needs.

Targets for Decorative Coatings
We can offer many types of rotatable and planar sputtering targets as well as evaporation materials for decorative coatings. Applying the optimization of target geometry, high oxidation and wear resistence, superior uniformity and coating quality can be provided.

Rotatable Targets
Used extensively in large area coatings, provide longer life and more sputter-able mass due to its large rotating sputter surface area.

SAFINA pioneered the development of cold sprayed silver rotatable targets. The targets are now in use at leading edge large area coaters.

Ag Rotatable Targets offer as low as 20 micron grain size, high density, up to 90% material utilization, <50 ppm O₂ content, 4N purity, target refill and respray capability, and design flexibility. Flame spray, arc spray, and cold gas spray technologies are offered.

Targets for Optical Media Industry
SAFINA manufactures wide variety of sputtering targets for optical discs, such as CD, CD-R, DVD±R, CR±RW, DVD±RW, and DVD9. Targets are produced based on the requested design and geometry keeping stable high quality and precision machining. As a reference, our products match with numerous types of metallizers made by Singulus, M2, Balzers, Tapematic, Anwell etc. Our recycling services for spent targets and precious metal scrap from masks complete the offer for our customers.

Target materials:

• Pure silver – Ag 4N purity, monoblocks for CD-R and DVD±R
• Silver alloys – targets for DVD9, non-standard alloys on request
• Pure gold – Au 4N & 5N purity, in monoblocks or profiled bonded targets with higher utilization
• Copper-aluminium – CuAl gold colour material for gold-discs

Targets for Semiconductor Industry
Semiconductor industry, one of the largest consumers of sputtering targets and evaporating materials, is another key market for SAFINA, a.s. We manufacture and supply high purity materials mainly from precious metals and their alloys for various sputtering and evaporation coating systems to our customers in semiconductor business. Our quality based on precise analyses in our laboratories meets high demands of the market.

Monoblock and bonded sputtering targets made of precious metals and their alloys:

Ag 4N, Au 4N, Au 5N, Pt 4N, Pd 3N5

Special Targets and Services
In order to satisfy individual needs together with sputtering targets manufactured by classic production techniques, SAFINA is able to offer special technologies for sputtering targets production, e.g. powder metallurgy for precious metal targets alloyed with refractory metals, spraying techniques, diverse types of bonding, manufacturing profiled targets with extreme high utilization, backing plate repairs, etc.

Analytical Equipment
GDMS, XRF, ICP-OES, AAS, metallographic grain size determination is used for analysis and certification.

Services
Technical support and analytical laboratory services are available.

SAFINA offers a full range of refining services including pool account and precious metal management programs.

Both metallic and nanofoil technology target bonding services are offered.

Precious metal refining services are offered to provide a full circle metal management system.